The lineup of semiconductor heat treatment furnaces performs oxidation, diffusion and CVD at 140 deg-C - 2000 deg-C. The heat treatment furnaces are used for power semiconductors, silicon and composite semiconductors, solar cells, organic EL (OLED), polyimide, MEMS, VCSEL and other materials.

Furnaces are available with top exhaust and bottom exhaust. A vertical furnace that combines hydrogen anneal and polyimide process is available now also (see below).

Fabrication of semiconductors consists of four processing categories; deposition, removal, patterning, and modification of electrical properties. It is the final processing category – modification of electrical properties – that utilizes an industrial furnace …

Our flagship product. A broad lineup that ranges from experimental applications up to mass production with excellent temperature distribution and atmosphere control. Features . Outline. polyimide and thin wafer oxidation, diffusion and CVD. a large-capacity stocker and features a short cycle time. and thin wafer oxidation, diffusion and CVD.

Discover how semiconductor furnaces ensure precise temperature control critical for oxidation, diffusion, annealing, and deposition processes. Learn about the importance of predictive maintenance and continuous monitoring with vibration sensors to prevent downtime and maintain wafer purity levels.

This large-batch mass-production type vertical diffusion furnace can process a maximum of 100 wafers (300-mm / 12-inch) or 16 FOUPs a batch. An LGO heater is used for superior temperature characteristics from low temperatures to medium high temperatures.

Semiconductor furnaces for diffusion, oxidation, doping, and other processes in wafer and cell manufacturing (4”, 6”, 8” and 12” wafers).

This vertical furnace with a built-in stocker processes 8-inch wafers at ultra-high temperatures in large batches. This furnace is a semiconductor heat treatment system that can perform oxidation, diffusion, LPCVD, activation annealing and various other heat treatments.

Diffusion furnaces are primarily – but not exclusively – used in semiconductor doping, where an intrinsic semiconductor is heated to a setpoint temperature and exposed to a vapor-phase material.

2024年7月29日 · Established in 1982, SH Scientific, a leading manufacturer of laboratory equipment, has recently introduced advanced tube furnace turn-key systems that seamlessly integrate various semiconductor manufacturing processes, including doping, oxidation, annealing, and chemical vapor deposition.