A cylindrical magnetron has a cylindrical cathode of a certain length and radius present at the centre around which a cylindrical anode is present. The cavities are present at the …

Cylindrical Magnetrons have long been trusted in the glass coating industry to create uniform thin films while maximizing target utilization. Now, Angstrom Sciences has created a compact, …

Angstrom Sciences has developed cylindrical magnetron technology that embody: Robust mechanical and electrical construction Corrosion resistant and modular magnet bars …

This chapter presents a summary of the theory for cylindrical magnetrons. Solutions of the general equation for “selfconsistent trajectories” in the static case are obtained either by …

* The magnetic field confines the glow discharge plasma and increases the length of the path of electrons moving under the influence of the electric field. Magnetron Sputtering ♦ Planar …

Herein, a novel cylindrical magnetron sputtering target is presented, which has a uniformly distributed magnetic field on the target surface and the magnetic induction intensity is 20 mT …

Construction of Cavity Magnetron. A thick cylindrical cathode is present at the center and a cylindrical block of copper, is fixed axially, which acts as an anode. This anode block is made …

In this paper, we present a newly developed technology - RF plasma enhanced cylindrical magnetron sputter deposition (RF-PECMS). Using this technology the bore surface of a …

1990年5月23日 · Theory of high power cylindrical magnetron Abstract: Summary form only given. Making use of a macroscopic cold-fluid model for the electrons, the authors have formulated a …

The anode of a magnetron is fabricated into a cylindrical solid copper block. The cathode and filament are at the center of the tube and are supported by the filament leads. The filament …