Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

Material properties, microfabrication technology, mechanical behavior of of microstructures, design, and packaging. Case studies of sensors, wireless communications, fluidic systems, micro engines, ...

The current state of the art of embedded motion sensing is based around micro-electromechanical systems (MEMS) devices. These miracles of microfabrication use tiny silicon structures, configured ...

This is a maskless technique (similar to projection lithography) to create patterns in a photosensitive resin (photoresist). This is a common step in many microfabrication operations like ...

Paul Bergstrom’s research interests include the integration of microelectromechanical (MEMS) elements with microelectronics processing in ways which minimize the impact of the MEMS processing on the ...

This is the frontier of microfabrication—the process of making microscopic structures that are crucial for the operation of everything from computer chips to medical devices. Traditionally ...

SPIE Photonics West is the world's leading photonics technologies event. Thousands of people attend Photonics West each year to learn, connect, and find the latest research and products. Topics cover ...