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The Wafer XRD 300 stands as an ultra-fast, high-precision metrology module designed for crystal orientation and wafer geometry control. Introducing the Wafer XRD 300: a high-speed X-Ray diffraction ...
Precise characterization of the wafer offcut or miscut ... to protect the underlying 4H-SiC crystal and allow the defects to have a predictable orientation throughout epitaxial growth.
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