The current state of the art of embedded motion sensing is based around micro-electromechanical systems (MEMS) devices. These miracles of microfabrication use tiny silicon structures, configured ...

Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

This is a maskless technique (similar to projection lithography) to create patterns in a photosensitive resin (photoresist). This is a common step in many microfabrication operations like ...

Material properties, microfabrication technology ... and graduate students interested in the physics and design of microsensors, size scale in MEMS materials, micro and nanomanipulation, etc. should ...

Fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other ...

This is the frontier of microfabrication—the process of making microscopic structures that are crucial for the operation of everything from computer chips to medical devices. Traditionally ...

Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...