Figure 2 shows an example of the model fitted to the experimental spectra from the FTIR system and the wafer maps for all parameters of interest. A further look at the correlation of the measured ...
Figure 1. (left) Nicolet Summit X FTIR Spectrometer with a Thermo Scientific ™ Everest ™ diamond attenuated total reflectance (ATR) accessory; and (right) Niton XL5 Plus Handheld XRF Analyzer.
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