mccormick.northwestern.edu4 年
MECH_ENG 381: Intro to Micro-Electro-Mechanical Systems
Material properties, microfabrication technology, mechanical behavior of of microstructures, design, and packaging. Case studies of sensors, wireless communications, fluidic systems, micro engines, ...
mccormick.northwestern.edu6 年
MECH_ENG 381: Intro to Micro-Electro-Mechanical Systems
Material properties, microfabrication technology, mechanical behavior of of microstructures, design, and packaging. Case studies of sensors, wireless communications, fluidic systems, micro engines, ...