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CR-AFM maps over a Cu line embedded into a low-k diele…
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Dielectric constants (k) of the porous low-k dielectric layers …
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Full characterization of ultrathin 5nm low-k dielectric films: Influence of thickness and ...
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Figure 1 from Integration of Cu and extra low-k dielectric (k=2.5/spl sim/2.2) for 65/45/32nm ...
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Low Dielectric Materials for Microelectronics | IntechOpen

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